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About
Megatech GmbH specializes in advanced filtration and purification systems for air, bulk or specialty gases, and chemicals, focusing on micro contamination control to enhance process reliability and reduce defects. They provide fluid management solutions that maximize productivity and improve product yields in processes such as bulk chemical delivery, chemical mechanical polishing (CMP), wafer edge cleaning (WEC), and lithography. Their offerings include complete fluid handling networks designed to be leak-free and reliable.
Products & Services
Gas Filtration & PurificationFluid Management SolutionsSpray ProductsSpectrometer
Quick Facts
- Location
- 01257 Dresden, Germany, Germany
- Category
- Process Control
