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Ecosys Abatement
Process Control
About
Ecosys Abatement manufactures advanced gas abatement systems specifically designed for the semiconductor industry. Their product line includes solutions for various process modules and types, achieving over 99% destruction/removal efficiency for gases such as PFCs and greenhouse gases. They utilize technologies such as plasma/wet and combustion burn/wet systems, and their offerings include a range of chemistries including pyrophorics, toxics, corrosives, and oxidizers. The company serves industries including semiconductor manufacturing, flat panel display, MEMS, PV, power storage, data storage, R&D, oil & gas, specialty chemicals, and nanomaterials.
Products & Services
Marathon™ 91 SeriesMarathon M91Marathon M91AMarathon M91AUMarathon M91PDMarathon M91UGuardian™ 91 SeriesGuardian G91Vector™ 91 SeriesVector V91CDO™ 91 SeriesCDO 91Legacy EquipmentMarathon 8500/8600Guardian GS4/GS8
Quick Facts
- Location
- Surprise, United States, United States
- Founded
- 1984
- Category
- Process Control
