Spacetek Technology AG manufactures time-of-flight residual gas analyzers (TOF-RGA) under the IonTamerâ„¢ brand. These instruments are designed for real-time monitoring of gas composition in semiconductor manufacturing processes, providing high sensitivity and resolution. The IonTamerâ„¢ technology is utilized in advanced chip manufacturing and OLED-display manufacturing, enabling the detection of all gas species, real-time reaction adjustments, and predictive maintenance cycles. The instruments are capable of measuring gas composition with a sensitivity in the parts per million (ppm) range and can operate in demanding vacuum environments.
solid-state LiDAR
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