VPD-ICPMS

About

Elemental Scientific, the developer of VPD-ICPMS technology, offers a range of high-throughput, automated production tools for online monitoring of metal contamination on semiconductor wafers. The Radian VPD-ICPMS system is a flagship product that boasts the fastest and most automated vapor phase decomposition capabilities in the world. This innovative solution enables ultra-low detection limits and is designed for compact and high productivity models, catering to various fab integration needs. The system features a radial fast-scanning nozzle, all-in-one process module, and advanced ICPMS integration, making it an ideal solution for fab applications. With its ability to scan wafer surfaces and edges quickly and accurately, the Radian VPD-ICPMS system provides immediate transfer and analysis of scan solutions, eliminating risks of contamination or evaporation. By offering customizable solutions for various wafer types, Elemental Scientific helps semiconductor manufacturers ensure high-quality products while reducing production costs.