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About
PHT株式会社 specializes in the design and manufacturing of semiconductor transfer systems and cleaning equipment, particularly for high-purity single crystal silicon substrates known as wafers. The company provides advanced transport systems, including in-process and between-process wafer transport devices, as well as cleaning equipment such as automatic stripping cleaners and batch cleaning systems. PHT supports the manufacturing processes for 300mm wafers for advanced devices and 200mm wafers for IoT and automotive applications, focusing on high precision transport and cleaning technologies to enhance semiconductor production.
Products & Services
Wafer Transport Robot Series4-Axis Clean Robot3-Axis Clean RobotGlass Substrate Clean RobotWafer Transport Device SeriesWafer Cassette ChangerWafer Transport DeviceEFEMSorterWafer Cleaning Equipment SeriesAutomatic Stripping DeviceWafer Batch Automatic Cleaning DeviceCarrier Substrate Acceptance Cleaning Device
Quick Facts
- Location
- Japan
- Category
- Industrial Automation
